EXOTHERMIC PROCESSES IN POROUS SILICON

H.A.Hasanov, İ.İ.Aliyev

Fast oxidation of porous silicon in air has been found to occur as combustion or an explosion. The combustion process takes place in porous layers having the thickness lower than 60mcm, while the explosion is observed in thicker layers. The explosion process is supposed to develop via thermal overheating due to exponential increase of the reaction rate with the temperature rise.