Abstract
The proposed review is dedicated to the latest achievements in the field of magnetron deposition of thin-film anode functional layers (AFLs)for solid oxide fuel cells (SOFCs) of various designs (electrolyte-supported, anode-supported and micro-SOFC). Manufacturing of SOFCs components remains nowadays a key point for the industrial development of this electrochemical conversion device. Formation of thin nanostructured anodes by physical vapor deposition methods allows increasing efficiency of SOFCs due to the reduction of polarization losses at the anode. The review discusses the use of thin- film anodes for different SOFC configurations intended to work in low, intermediate and high temperature ranges. The influence of the deposition parameters, microstructure and chemical composition of AFLs on SOFC performance is analyzed.